Introductory MEMS
Adams, Thomas M.
Introductory MEMS fabrication and applications Thomas M. Adams, Richard A. Layton. - New York : Springer, c2010. - xv, 444 p.; 22 cm.
Includes bibliographical references and index.
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
License restrictions may limit access.
9788132206637 = Introductory MEMS
12102532
08,N20,0973 dnb
Microelectromechanical systems.
Electronic apparatus and appliances.
Transducers.
MEMS.
TK7875 / .A33 2010 TK7875
621.381 / ADA-I
Introductory MEMS fabrication and applications Thomas M. Adams, Richard A. Layton. - New York : Springer, c2010. - xv, 444 p.; 22 cm.
Includes bibliographical references and index.
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
License restrictions may limit access.
9788132206637 = Introductory MEMS
12102532
08,N20,0973 dnb
Microelectromechanical systems.
Electronic apparatus and appliances.
Transducers.
MEMS.
TK7875 / .A33 2010 TK7875
621.381 / ADA-I