Fundamentals of Semiconductor Fabrication (Record no. 156058)
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000 -LEADER | |
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fixed length control field | 00179 a2200073 4500 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Gary S. May, Simon M. Sze |
245 ## - TITLE STATEMENT | |
Title | Fundamentals of Semiconductor Fabrication |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Name of publisher, distributor, etc | Wiley |
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