000 | 00657nam a22002297a 4500 | ||
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003 | IIITD | ||
005 | 20221003161403.0 | ||
008 | 221003b xxu||||| |||| 00| 0 eng d | ||
020 | _a9788126532605 | ||
040 | _aIIITD | ||
082 |
_a621.38 _bMAY-F |
||
100 | _aMay, Gary S. | ||
245 |
_aFundamentals of semiconductor fabrication _cby Gary S. May and Simon M. Sze |
||
260 |
_bWiley, _aNew Delhi : _c©2004 |
||
300 |
_axiii, 305 p. : _bill. ; _c24 cm. |
||
500 | _aThis book includes index. | ||
650 | _aSemiconductors | ||
650 | _aIntegrated circuits | ||
650 | _aDesign and construction | ||
700 | _aM. Sze, Simon | ||
942 |
_2ddc _cREF |
||
999 |
_c170671 _d170671 |