| 000 | 02346cam a22003494a 4500 | ||
|---|---|---|---|
| 001 | 16645365 | ||
| 003 | IIITD | ||
| 005 | 20140709115507.0 | ||
| 008 | 110209s2011 enkaf b 001 0 eng | ||
| 010 | _a 2011004247 | ||
| 016 | 7 |
_a015757784 _2Uk |
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| 016 | 7 |
_a015875539 _2Uk |
|
| 020 | _a9781107645790 | ||
| 035 | _a(OCoLC)ocn703621184 | ||
| 040 |
_aDLC _cDLC _dYDX _dYDXCP _dUKMGB _dCDX _dBWX _dDLC |
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_aTK7875 _b.K83 2011 |
| 082 | 0 | 0 |
_a621.381 _222 _bKUB-G |
| 084 |
_aTEC008080 _2bisacsh |
||
| 100 | 1 | _aKubby, Joel A. | |
| 245 | 1 | 2 |
_aGuide to hands-on MEMS design and prototyping _cJoel Kubby. |
| 260 |
_aCambridge, UK ; _aNew York : _bCambridge University Press, _c2011. |
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| 300 |
_axi, 166 p., [16] p. of plates : _bill. (some col.) ; _c24 cm. |
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| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 8 | _aMachine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics. | |
| 520 | _a"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"-- | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 856 | 4 | 2 |
_3Cover image _uhttp://assets.cambridge.org/97805218/89254/cover/9780521889254.jpg |
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