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001			8570834
005			20170731125145.0
006			m d
007			cr n
008			820204s2010 nyua sb 001 0 eng d
015			_a08,N20,0973 _2dnb
020			_a9788132206637
028	5	2	_a12102532
035			_a(WaSeSS)ssj0000449744
040			_aITD _cITD _dITD _dAU@ _dBWX _dSINLB _dYDXCP _dMUU _dDEBBG _dGZQ _dVRC _dDLC _dWaSeSS
042			_alccopycat
050		4	_aTK7875 _b.A33 2010
050		4	_aTK7875
082	0	4	_a621.381 _222 _bADA-I
084			_aZN 3750 _2rvk
100	1		_aAdams, Thomas M.
210	1	0	_aIntroductory MEMS
245	1	0	_aIntroductory MEMS _bfabrication and applications _cThomas M. Adams, Richard A. Layton.
260			_aNew York : _bSpringer, _cc2010.
300			_axv, 444 p.; _c22 cm.
504			_aIncludes bibliographical references and index.
505	0		_a1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
506			_aLicense restrictions may limit access.
650		0	_aMicroelectromechanical systems.
650		0	_aElectronic apparatus and appliances.
650		0	_aTransducers.
650	0	7	_aMEMS. _2swd
700	1		_aLayton, Richard A.
773		0	_tSpringerLink ebooks - Engineering (2010)
910			_aLibrary of Congress record
942			_2ddc _cBK
999			_c8332 _d8332