000 00453nam a22001577a 4500
008 130601b xxu||||| |||| 00| 0 eng d
020 _a9788126527151
082 _a621.381
_bANA-M
100 _aAnanthasuresh, G.K.
245 _aMicro and smart systems
_cG.K. Ananthasuresh
260 _aNew Delhi :
_bWiley,
_cc2010.
300 x _axxvii, 392 p.
650 _aMicroelectromechanical systems
658 _aIntelligent control systems
942 _2ddc
_cBK
999 _c8416
_d8416