Introductory MEMS fabrication and applications
Material type:![Text](/opac-tmpl/lib/famfamfam/BK.png)
- 9788132206637
- 621.381 22 ADA-I
- TK7875 .A33 2010
- TK7875
- ZN 3750
Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds |
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IIITD General Stacks | Electronics and Communication Engineering | 621.381 ADA-I (Browse shelf(Opens below)) | Available | 002501 |
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621.3804 OPP-D Discrete-time signal processing | 621.381 Electronics for you plus | 621.381 ACH-F Fundamentals of semiconductor devices | 621.381 ADA-I Introductory MEMS | 621.381 AGA-F Foundations of analog and digital electronic circuits | 621.381 AGA-F Foundations of analog and digital electronic circuits | 621.381 ALI-E Electronic engineering materials and devices |
Includes bibliographical references and index.
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
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